Silicon Carbide (SiC) Boat

Product Description

Material: Silicon carbide (SiC).
Structure: Sintered as a single piece.
Applications: Used in photovoltaic silicon wafer online diffusion, annealing, and CVD systems as a carrier for silicon wafers.

Product Description

Material: Silicon carbide (SiC).
Structure: Sintered as a single piece.
Applications: Used in photovoltaic silicon wafer online diffusion, annealing, and CVD systems as a carrier for silicon wafers.

Product Advantages

Excellent dimensional precision and consistency.
Widely used in LPCVD, oxidation, and annealing processes.
Excellent resistance to strong acids and alkalis.
High surface purity and density.
Flexible size customization.
Service life under full load: >36 months.
Very low metal impurity content.

Product Advantages

Excellent dimensional precision and consistency.
Widely used in LPCVD, oxidation, and annealing processes.
Excellent resistance to strong acids and alkalis.
High surface purity and density.
Flexible size customization.
Service life under full load: >36 months.
Very low metal impurity content.

Product Specifications

LWH	320mm185mm293.9mm (Customizable)
Acid-alkali Resistance	＞100 run
Heat Insulating Temperature	1200℃
Loaded Wafer Size/Quantity	182mm/102 slots (Customizable)
Sic Content	≥87%
Fe Content	＜0.02%
Service Life	＞36 months