Laplace’s self-developed B, C, and D series quartz special coatings are mainly applied to the surface of core quartz components in LPCVD, boron diffusion, and other devices, effectively preventing erosion from processes and extending the lifespan of quartz components. This reduces device costs and improves production efficiency. The coatings are easy to apply and cure, with customized products based on different temperatures and environmental conditions.
The B series surface protection coating can effectively protect quartz tubes during the LPCVD process, reducing the adhesion, penetration, and damage caused by polycrystalline silicon to the quartz, thereby extending the lifespan of quartz tubes. After long-term use, the strength reduction of quartz components is decreased from 70% to below 40%.
The C series coating enhances the mechanical strength of quartz materials within the temperature range of room temperature to 1050°C, making them less prone to deformation and fracture during use, which helps extend the service life of quartz tubes.
The D series surface anti-peeling coating can securely adsorb the polycrystalline silicon coating in the LPCVD process and delay the peeling of the coating, thereby prolonging the usage time of the quartz tubes.
The B series surface protection coating can effectively protect quartz tubes during the LPCVD process, reducing the adhesion, penetration, and damage caused by polycrystalline silicon to the quartz, thereby extending the lifespan of quartz tubes. After long-term use, the strength reduction of quartz components is decreased from 70% to below 40%.
The C series coating enhances the mechanical strength of quartz materials within the temperature range of room temperature to 1050°C, making them less prone to deformation and fracture during use, which helps extend the service life of quartz tubes.
The D series surface anti-peeling coating can securely adsorb the polycrystalline silicon coating in the LPCVD process and delay the peeling of the coating, thereby prolonging the usage time of the quartz tubes.
