Silicon Carbide (SiC) Integrated Boat Carrier

Product Description

Material: Silicon carbide (SiC).
Structure: Sintered as a single piece.
Applications: Used in photovoltaic silicon wafer diffusion, annealing, and CVD systems as a carrier for silicon wafer cassettes.

Product Description

Material: Silicon carbide (SiC).
Structure: Sintered as a single piece.
Applications: Used in photovoltaic silicon wafer diffusion, annealing, and CVD systems as a carrier for silicon wafer cassettes.

Product Advantages

Excellent dimensional precision and consistency, with tolerance level: 0.1mm.
Outstanding resistance to strong acids and alkalis, acid-alkali wash tolerance > 50 cycles.
Flexible size customization, with adjustable number of wafer basket clips.
Very low metal impurity content.

Product Advantages

Excellent dimensional precision and consistency, with tolerance level: 0.1mm.
Outstanding resistance to strong acids and alkalis, acid-alkali wash tolerance > 50 cycles.
Flexible size customization, with adjustable number of wafer basket clips.
Very low metal impurity content.

Product Specifications

LWH	2140mm300mm200mm (Customizable)
Acid-alkali Resistance	＞50 cycles (cleaning cycle)
Heat Insulating Temperature	1200℃
Size Tolerance	0.1mm
Wafer Cassette Carry Quantity	10 (Customizable)
Max Load Weight	120kg
SiC Content	≥87%
Fe Content	＜0.02%